We have located links that may give you full text access.
Reactive dynamics analysis of critical Nb<sub>2</sub>O<sub>5</sub> sputtering rate for drum-based metal-like deposition.
Applied Optics 2017 Februrary 2
Drum-based metal-like film deposition for oxide was investigated using single wavelength in situ monitoring. The data were used to investigate the oxidation mechanism using combined second-order kinetic and parabolic models. A critical Nb<sub>2</sub>O<sub>5</sub> deposition rate of 0.507 nm/s was found at drum rotation of 1 rev/s. However, Nb<sub>2</sub>O<sub>5</sub> samples prepared at varying deposition rates showed that the deposition rate must be much lower than the critical deposition rate to achieve reasonable absorption. Thus simulation for the volume-fraction of metal in the oxide layer was done using effective medium approximation and a distribution function. Simulation gave high agreement with experimental results and allows the prediction of extinction coefficients at various deposition rates.
Full text links
Related Resources
Get seemless 1-tap access through your institution/university
For the best experience, use the Read mobile app
All material on this website is protected by copyright, Copyright © 1994-2024 by WebMD LLC.
This website also contains material copyrighted by 3rd parties.
By using this service, you agree to our terms of use and privacy policy.
Your Privacy Choices
You can now claim free CME credits for this literature searchClaim now
Get seemless 1-tap access through your institution/university
For the best experience, use the Read mobile app