A novel ballistic model for the subthreshold behavior of nanosheet transistors.

A novel ballistic model for the subthreshold current of nanosheet transistors is successfully developed based on the Landauer approach with the three-dimensional number of channels. The ballistic threshold voltage can also be achieved through the calculated free charge density induced by the three-dimensional density-of-states equal to the substrate doping concentration. It indicates that under the low drain voltage corresponding to the fermi distribution function, the subthreshold current is mainly governed by the low contact potential. However, under the high drain voltage corresponding to the fermi distribution function, the thermal voltage, instead of the contact potential between the source and drain, initiates the subthreshold current. Besides subthreshold current and threshold voltage, the ballistic conductance and subthreshold swing are also revealed in the subthreshold conduction. It indicates that the thin silicon, thin gate oxide, heavy substrate doping density, and high work function will alleviate the ballistic effects, decrease the subthreshold current/swing, and increase the threshold voltage/ballistic resistance.