Nano-printed miniature compound refractive lens for desktop hard x-ray microscopy.

Hard x-ray lenses are useful elements in x-ray microscopy and in creating focused illumination for analytical applications such as x-ray fluorescence imaging. Recently, polymer compound refractive lenses for focused illumination in the soft x-ray regime (< 10 keV) have been created with nano-printing. However, there are no such lenses yet for hard x-rays, particularly of short focal lengths for benchtop microscopy. We report the first instance of a nano-printed lens for hard x-ray microscopy, and evaluate its imaging performance. The lens consists of a spherically focusing compound refractive lens designed for 22 keV photon energy, with a tightly packed structure to provide a short total length of 1.8 mm and a focal length of 21.5 mm. The resulting lens technology was found to enable benchtop microscopy at 74x magnification and 1.1 μm de-magnified image pixel size at the object plane. It was used to image and evaluate the focal spots of tungsten-anode micro-focus x-ray sources. The overall system resolution with broadband illumination from a tungsten-anode x-ray tube at 30 kV and 10 mm focal distance was measured to be 2.30±0.22 μm.