Integration of Nanomaterials into Three-Dimensional Vertical Architectures.

A novel layer-by-layer three-dimensional (3D) architecture allowing one to expand device fabrication in the vertical direction and integrating functional nanomaterials is presented by emulating civil engineering. The architecture uses SU-8 pillars as structural columns, which support multiple horizontal suspended thin films. The films then serve as platforms for the integration of nanomaterials and nanodevices. Multiple graphene layers suspended across SU-8 pillars with precise control on their vertical spacing are demonstrated. In addition to graphene, silicon nitride films that offer high strength yield and thickness control are also presented. Metallic microstructures, plasmonic nanostructures, semiconducting quantum dots, and monolayer graphene on the suspended films are achieved to prove the capability of integrating functional nanomaterials. This work provides the potential to integrate highly compact micro/nanoscale devices at different vertical levels with high surface density, which allows for more capabilities and functionalities in a single device.