Experimental Verification of the Pumping Effect Caused by the Micro-Tapered Hole in a Piezoelectric Atomizer.

In this study, we examined the use of a dynamic micro-tapered hole as a micro-scale tapered flow tube valveless piezoelectric pump. Firstly, we obtained photographs of a micro-tapered hole by using an environmental scanning electron microscope (ESEM). Then, we explained the pump effect of the micro-tapered hole, and derived the atomization rate equation. Furthermore, we reported an atomization rate measurement experiment that eliminated the atomization caused by a pressure increase, and demonstrated that a change in the volume of a micro-tapered hole could produce atomization. The experimental results indicate that, under the same voltage, the forward atomization rate is much higher than the reverse atomization rate and that the atomization rate increases with the micro-tapered hole volume. The experimental results show that the atomization of the micro-tapered aperture atomizer is caused by its pumping effect. Moreover, the flow resistance and volume of the micro-tapered hole can affect the atomization rate.