Add like
Add dislike
Add to saved papers

Lithographic source and mask optimization with narrow-band level-set method.

Optics Express 2018 April 17
Source and mask optimization (SMO) remains a key technique to improve the wafer image printability for technology nodes of 22 nm and beyond, enabling the continuation of the immersion lithography. In this paper, we propose a distance level-set regularized reformulation of the SMO maintaining the desired signed distance property, which secures stable curve evolution and accurate computation with a simpler and more efficient numerical implementation. Consequently, computation load caused by convolution operations and memory requirements of the electric-field caching technique (EFCT) is significantly eased by performing computation only in the narrow band; moreover, the convergence of the updating process is further improved by applying larger Euler time steps of the Courant-Friedrichs-Lewy (CFL) condition with reduced optimization dimensionality. Simulation results of the proposed narrow-band level-set based SMO prove to improve the computation efficiency, memory usage and imaging performance of the full domain methods.

Full text links

We have located links that may give you full text access.
Can't access the paper?
Try logging in through your university/institutional subscription. For a smoother one-click institutional access experience, please use our mobile app.

For the best experience, use the Read mobile app

Mobile app image

Get seemless 1-tap access through your institution/university

For the best experience, use the Read mobile app

All material on this website is protected by copyright, Copyright © 1994-2024 by WebMD LLC.
This website also contains material copyrighted by 3rd parties.

By using this service, you agree to our terms of use and privacy policy.

Your Privacy Choices Toggle icon

You can now claim free CME credits for this literature searchClaim now

Get seemless 1-tap access through your institution/university

For the best experience, use the Read mobile app