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Simulation Techniques for Nanoelectromechanical (NEM) Relay.
Journal of Nanoscience and Nanotechnology 2018 September 2
Nanoelectromechanical (NEM) relays have been studied for use in low-power logic applications because of their conspicuous features of (i) zero off-state leakage and (ii) abrupt on/off switching behavior in principle. In this study, a lateral NEM relay is analytically modeled. Then, the pull-in/out voltages, which work as turn-on/off voltages for the device, are estimated quantitatively using equations that explain the operational principle of the NEM relay. Exemplary design parameters are proposed to ensure the operation of the NEM relay as a logic device, and its transfer characteristics are analyzed.
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