We have located links that may give you full text access.
Three-Dimensional ZnO Nanostructure Based Gas and Humidity Sensors.
Journal of Nanoscience and Nanotechnology 2018 Februrary 2
The ZnO nanostructure environmental sensors were prepared via the three-dimensional through silicon via (3D-TSV) technique. For 3D-TSV, the diameter and length of the Si via were about 200 and 400 μm, respectively. For nitrogen oxide (NO), the measured responses were around ~12, ~16, and ~20% when the concentrations of the injected NO gas were 20, 40 and 60 ppm, respectively. For humidity and temperature sensing, the measured nanowire current increased logarithmically with increasing chamber temperature. The response to relative humidity increased with increasing temperature.
Full text links
Related Resources
Get seemless 1-tap access through your institution/university
For the best experience, use the Read mobile app
All material on this website is protected by copyright, Copyright © 1994-2024 by WebMD LLC.
This website also contains material copyrighted by 3rd parties.
By using this service, you agree to our terms of use and privacy policy.
Your Privacy Choices
You can now claim free CME credits for this literature searchClaim now
Get seemless 1-tap access through your institution/university
For the best experience, use the Read mobile app