Fine tuning an aberration corrected ADF-STEM.

Aberration correctors offer greatly enhanced resolution in electron microscopes, however can require dramatically more complicated adjustments. A method of computer adjustment of a probe forming aberration corrector in a Scanning Transmission Electron Microscope (STEM) is proposed and analyzed using image simulation. This method works directly with the image and should work well with crystalline specimens. It does not have a significant dependence on post specimen lens aberrations.