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JOURNAL ARTICLE
RESEARCH SUPPORT, NON-U.S. GOV'T
Fine electron biprism on a Si-on-insulator chip for off-axis electron holography.
Ultramicroscopy 2018 Februrary
Off-axis electron holography allows both the amplitude and the phase shift of an electron wavefield propagating through a specimen in a transmission electron microscope to be recovered. The technique requires the use of an electron biprism to deflect an object wave and a reference wave to form an interference pattern. Here, we introduce an approach based on semiconductor processing technology to fabricate fine electron biprisms with rectangular cross-sections. By performing electrostatic calculations and preliminary experiments, we demonstrate that such biprisms promise improved performance for electron holography experiments.
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