Precise measurement of inner diameter of mono-capillary optic using X-ray imaging technique.

BACKGROUND: Mono-capillary optics have been applied to increase the performance of X-ray instruments. However, performance of a mono-capillary optic strongly depends on the shape accuracy, which is determined by the diameters of the inner hollow of the capillary along the axial direction.

OBJECTIVE: To precisely determine the inner diameter of the capillary optic used in X-ray imaging technique, which aims to replace the conventional method using a visible microscope.

METHODS: High spatial resolution X-ray images of the mono-capillary optic were obtained by a synchrotron radiation beamline. The inner diameter of the mono-capillary optic was measured and analyzed by the pixel values of the X-ray image.

RESULT: Edge enhancement effect was quite useful in determining the inner diameter, and the accuracy of the diameter determination was less than 1.32 μm. Many images obtained by scanning the mono-capillary optic along the axial direction were combined, and the axial profile, consisting of diameters along the axial direction, was obtained from the combined image. The X-ray imaging method could provide an accurate measurement with slope error of±19 μrad.

CONCLUSIONS: Applying X-ray imaging technique to determine the inner diameter of a mono-capillary optic can contribute to increasing fabrication accuracy of the mono-capillary optic through a feedback process between the fabrication and measurement of its diameter.