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Using Fundamental Spectroscopy to Elucidate Kinetic and Energetic Mechanisms within Environmentally Relevant Inductively Coupled Plasma Systems.
Journal of Physical Chemistry. A 2017 October 13
Understanding energy distributions and kinetic processes in Nx Oy plasma systems is vital to realizing their potential in a range of applications, including pollution abatement. Energy partitioning between degrees of freedom and multiple molecules formed within Nx Oy plasma systems (N2 , N2 O, N2 /O2 ) was investigated using both optical emission and broadband absorption spectroscopies. Specifically, we determined electron temperatures (Te ) as well as rotational (TR ) and vibrational (TV ) temperatures for various N2 (B3 Πg and C3 Πu ) and NO (X2 Π and A2 Σ+ ) states. TR and TV for both molecules (regardless of state) show a strong positive correlation with applied plasma power, as well as a negative correlation with system pressure. In all cases, TV values are significantly higher than TR for both species, suggesting vibrational modes are preferentially excited over rotational degrees of freedom. Time-resolved optical emission spectroscopy was utilized to determine rate constants, providing mechanistic insight and establishing the relationships between system parameters and plasma chemistry. Ultimately, the combination of these data allows us to glean information regarding both the kinetics and energetics of N2 and NO molecules formed within nitrogen- and oxygen-containing plasma systems for potential applications in gas remediation of pollutants.
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