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Subwavelength grating microlens with taper-resistant characteristics.

Optics Letters 2017 March 16
The subwavelength grating microlens has attracted much attention due to its variety of potential applications. Instead of the vertical sidewall profile normally considered by most recent works, a tapered sidewall profile is often obtained during current fabrication processes, especially during the fabrication of high aspect ratio structures. In this work, we have discovered that a tapered sidewall profile may have a significant destructive effect on the concentration properties of subwavelength concentrating lenses/metasurfaces. This is caused by the phase shift from the tapered profile that affects each individual phase shifter. More interestingly, we have further discovered that there exist some period/fill-factor combinations for phase shifters that "resist" the phase shift from the tapered structure. This study will provide an important avenue for the design of subwavelength concentrating lenses/metasurfaces when dealing with the tapered sidewall profile.

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