Large-aperture ground glass surface profile measurement using coherence scanning interferometry.

We present a coherence scanning interferometer configured to deal with rough glass surfaces exhibiting very low reflectance due to severe sub-surface light scattering. A compound light source is prepared by combining a superluminescent light-emitting diode with an ytterbium-doped fiber amplifier. The light source is attuned to offer a short temporal coherence length of 15 μm but with high spatial coherence to secure an adequate correlogram contrast by delivering strongly unbalanced optical power to the low reflectance target. In addition, the infrared spectral range of the light source is shifted close to the visible side at a 1,038 nm center wavelength, so a digital camera of multi-mega pixels available for industrial machine vision can be used to improve the correlogram contrast further with better lateral image resolutions. Experimental results obtained from a ground Zerodur mirror of 200 mm aperture size and 0.9 μm rms roughness are discussed to validate the proposed interferometer system.