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Fabrication of Linear Array and Top-Orthogonal-to-Bottom Electrode (TOBE) CMUT Arrays with a Sacrificial Release Process.
The microfabrication processes for sacrificial-release based capacitive micromachined ultrasound transducer (CMUT) arrays are provided with an emphasis on top-orthogonal-to-bottom electrode (TOBE) 2D arrays. These arrays have significant promise for high-quality 3D imaging with reduced wiring complexity compared to fully-wired arrays. The protocols and best practices are outlined in significant detail along with design considerations and notes of caution for pitfalls and factors impacting yield.
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