Wave-optical modeling beyond the thin-element-approximation.

The optical design and analysis of modern micro-optical elements with high index contrasts and large numerical apertures is still challenging, as fast and accurate wave-optical simulations beyond the thin-element-approximation are required. We introduce a modified formulation of the wave-propagation-method and assess its performance in comparison to different beam-propagation-methods with respect to accuracy, required sampling densities, and computational performance. For typical micro-optical components, the wave-propagation-method is found to be considerably faster and more accurate at even lower sampling densities compared to the different beam-propagation-methods. This enables realistic wave-optical simulations beyond the thin-element-approximation for micro-optical components. As an example, the modified wave-propagation-method is applied for in-line holographic measurements of strongly diffracting objects. From a direct comparison of experimental results and corresponding simulations, the geometric parameters of a test object could be retrieved with high accuracy.