Hiroshi Shinotsuka, Shigeo Tanuma, Cedric J Powell, Dave R Penn
We have calculated inelastic mean free paths (IMFPs) for 42 inorganic compounds (AgBr, AgCl, AgI, Al2 O3 , AlAs, AlN, AlSb, cubic BN, hexagonal BN, CdS, CdSe, CdTe, GaAs, GaN, GaP, GaSb, GaSe, InAs, InP, InSb, KBr, KCl, MgF2 , MgO, NaCl, NbC0.712 , NbC0.844 , NbC0.93 , PbS, PbSe, PbTe, SiC, SiO2 , SnTe, TiC0.7 , TiC0.95 , VC0.76 , VC0.86 , Y3 Al5 O12 , ZnS, ZnSe, and ZnTe) for electron energies from 50 eV to 200 keV. These calculations were made with energy-loss functions (ELFs) obtained from measured optical constants for 15 compounds while calculated ELFs were utilized for the other 27 compounds...
2018: Surface and Interface Analysis: SIA